Piezoelectric-on-Silicon Resonators for Frequency Control and Sensing
Jeudi 1er juin 2017 14:00
- Duree : 1 heure
Lieu : Laboratoire TIMA, salle 312 - 46, avenue Félix Viallet, Grenoble
Orateur : Joshua LEE
Abstract :
Piezoelectric bulk materials have had a long-established presence in the areas of frequency control (e.g. Quartz crystals, SAW and BAW) and sensing (e.g. QCM and strain sensing). But the last two decades has seen substantial progress in piezoelectric thin film depositi on technology driven by developments in high-volume manufacturing. This is particularly the case for CMOS-compatible piezoelectric aluminium nitride (AlN) thin films. This seminar will first highlight some advances towards low impedance and high quality factor resonators for frequency control. The other part of the talk will illustrate how the advantages of AlN technology are exploited to realize resonant sensors targeting operation in ambient conditions and dissipative media. Examples include magnetometers developed for electronic compass applications and resonant sensing platforms operable in liquids.
Contact : libor.rufer@univ-grenoble-alpes.fr
Discipline évènement : (Physique)
Entité organisatrice : (TIMA)
Nature évènement : (Séminaire)
Site de l'évènement : Site Felix Viallet
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