Optical MEMS Technologies for Infrared Spectroscopy, Sensing, and Imaging

Orateur : Lorenzo FARAONE (IEEE-EDS Distinguished Lecturer, Microelectronics Research Group, The University of Western, Australia)

Improving current state-of-the-art infrared (IR) detector and focal plane array (FPA) technologies is focused on reducing cooling requirements, larger-format FPAs, extending to longer wavelengths, and/or adding so-called multi-colour capability, which allows real-time spectral information to be gathered from multipl e wavelength bands. Multi-spectral imaging results in improved target recognition and reduced false alarm rates in military scenarios, and is applicable to numerous remote sensing spectroscopy/imaging applications in civilian arenas. In order to provide a reduced size, weight and power (SWaP) solution, a micro-electromechanical systems (MEMS) based electrically tuneable Fabry-Perot filter technology has been developed that is compatible with individual detectors or large format 2-D imaging IRFPAs. Such a hybridised technology is capable of low-voltage tuning across the NIR/SWIR and MWIR wavelength bands for field-portable spectroscopy applications. In addition, future work to extend the technology into the VIS/NIR and LWIR wavelength bands will also be presented, as well as approaches to extending the technology to large format, imaging FPAs. http://imep-lahc.grenoble-inp.fr/events/special-seminar-professor-lorenzo-faraone-612474.kjsp?RH=IMEP_FR

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